 |
|
| In an effort to
fit seamlessly into most analysis systems, the iFAB product line is
able to read and write several common and custom file formats. The
supported file formats are broken down into functional areas: |
|
|
Defect
File Formats
('xx'
denotes multiple model numbers)
|
|
Type
|
Description
|
Versions
|
Suggested Equipment
|
iFAB Module Support
|
Read |
Write |
Modify |
|
TFF
|
Tencor File Format
|
1.0 +
|
KLA-Tencor:
7700, 6400, AIT-1, AIT-2, Swift Station, Klarity, Quest, 25xx;
Applied Materials(Orbot),
ADE; TSK |
iFAB-Defect,
iFAB-Bit, iFAB-FA |
Yes |
Yes |
Yes |
| KLARF |
KLA Results File
|
1.1,1.2
|
KLA-Tencor:
21xx, 25xx, Swift Station, Klarity, Quest; August;
Inspex |
iFAB-Defect,
iFAB-Bit, iFAB-FA |
Yes |
Yes |
Yes |
|
| |
|
Image
File Formats
|
|
Type
|
Description
|
Versions
|
iFAB Module Support
|
Read |
Write |
Modify |
|
JPEG
|
16 bit, 24 bit
color (Adobe)
|
All
|
iFAB-Defect
, iFAB-Test , iFAB-Utilities |
Yes |
Yes |
Yes |
|
Windows Bitmap
|
2,8,16,34 bit color, gray, monochrome
|
All
|
FAB-Defect
, iFAB-Test , iFAB-Utilities
, iFAB-Bit |
Yes |
Yes |
Yes |
|
TIFF
|
2,8,16,34 bit color, gray, monochrome (Adobe)
|
6.0
|
iFAB-Defect
, iFAB-Utilities |
Yes |
Yes |
Yes |
|
GIF
|
Compuserve, umcompressed.
256 color, 24 bit
|
85a
|
iFAB-Defect
, iFAB-Test , iFAB-Utilities |
Yes |
Yes |
Yes |
|
|
Design
File Formats
|
|
Type
|
Description
|
Versions
|
iFAB Module Support
|
Read |
Write |
Modify |
|
GDS-II
|
Cadence stream file format
|
All
|
iFAB-Defect
, iFAB-Bit |
Yes |
Yes |
Yes |
|
|
Other
File Formats
|
|
Type
|
Description
|
Versions
|
iFAB Module Support
|
Read |
Write |
Modify |
|
HTML
|
Hyper Text Markup Language; used as
communicating vehicle of Internet |
3.0, 4.0
|
All |
Yes |
No |
No |
|
XML
|
e-commerce data files, used in iFAB as setup and data files
|
1.0
|
All |
Yes |
Yes |
Yes |
|
|
| |
.
|
|
